In the laboratory of semiconductor thin film materials and devices directed by Prof. Fengzhen Liu and Prof. Yuqin Zhou, the ordered hexagonally arranged silicon micro- or nano- rods arrays for the radial junction solar cells application were successfully fabricated by reactive ion etching of c-Si wafer with non-close-packed polystyrene spheres template as a mask. By changing the size of the PS spheres and the RIE conditions, the lengths and diameters of the ordered micro-or nano-rod arrays can be easily controlled. This novel structure is suitable for high efficiency radial p-n junction solar cell devices which benefit from light trapping and carrier extraction.